Abstract:Kab lus no qhia txog cov txheej txheem ua, cov yam ntxwv, cov khoom siv, thiab kev siv ntawm ob peb niaj hnub ultra precision sib tsoo thiab polishing txoj kev.
Ntsiab lus:Ultra precision sib tsoo; Elastic emission ua; Mechanochemical sib tsoo; Sib nqus sib tsoo; Ultrasonic sib tsoo
1. Txheej txheem cej luam
Ultra precision machining thev naus laus zis cim cov qib ntawm lub teb chaws kev lag luam kev lag luam, ua lub luag haujlwm tseem ceeb hauv kev txhim kho kev ua tau zoo, kev ua tau zoo, kev ua neej, thiab kev tshawb fawb thiab kev tsim cov khoom siv high-tech hauv optoelectronic thiab mechanical khoom. Tam sim no, ultra precision machining hais txog machining yuam kev tsawg dua 0.01 μ m. Nto roughness tsawg dua Ra0.025 μ Kev ua ntawm m, tseem hu ua sub micron theem ua. Tam sim no, ultra precision machining tau nkag mus rau nanoscale, hu ua nanomachining.
Nyob rau hauv ultra precision machining, kev siv ntawm ultra precision txiav thiab ultra precision sib tsoo feem ntau nyob ntawm kev txhawb nqa ntawm cov khoom siv, cov cuab yeej, thiab lwm yam technologies. Vim muaj kev cuam tshuam thiab kev txwv ntawm nws cov txheej txheem kev ua haujlwm thiab ib puag ncig, nws nyuaj heev kom ua tiav precision machining. Vim nws cov qauv kev ua haujlwm tshwj xeeb thiab cov kev cai qis rau kev ua cov cuab yeej thiab ib puag ncig, kev sib tsoo ultra precision thiab polishing tuaj yeem ua tiav nanoscale lossis txawm tias atomic theem ua, thiab tau dhau los ua ib feem tseem ceeb ntawm ultra precision machining technology.
2. Ob peb ultra precision sib tsoo thiab polishing txoj kev
2.1 Mechanical action based ultra precision sib tsoo thiab polishing txoj kev Raws li cov neeg kho tshuab kev txiav txim, ultra precision sib tsoo thiab polishing txoj kev cia siab rau cov neeg kho tshuab kev txiav txim ntawm micro abrasive hais rau micro tshem tawm cov machined nto, ua tiav high-precision machining nto.
2.1.1 Elastic emission machining yog ib qho kev sib tsoo ultra precision uas tuaj yeem ua tiav qhov kev ua haujlwm siab thiab tsis tshua muaj roughness.
Thaum lub sijhawm ua haujlwm, cov khoom siv polyurethane yog siv los ua lub taub hau, thiab cov kua dej sib tsoo uas muaj cov khoom zoo abrasive (0.1-0.01 µ m) yog ntxiv ntawm lub siab ceev rotating lub taub hau thiab saum npoo ntawm lub workpiece yuav tsum tau ua, tsim ib tug npaum li cas ntawm lub siab. Lub dav hlau kwj thiab centrifugal quab yuam tsim los ntawm high-speed rotating machining lub taub hau ua rau cov khoom abrasive cuam tshuam los yog rub lub workpiece nto, uas ua rau cov atomic ua ke ntawm elastic deficiency cov ntaub ntawv, yog li tshem tawm cov ntaub ntawv ntawm lub workpiece nto. Nws tuaj yeem tiv thaiv kev tsis sib haum xeeb thiab tsis xws luag hauv cov khoom siv, tab sis nws tuaj yeem tsim ib qho me me ntawm "kev puas tsuaj" (xws li kev ua haujlwm tsis cuam tshuam), yog li ua tiav cov txheej txheem atomic. Thiab tuaj yeem tau txais qhov chaw zoo heev. Thaum ua cov silicon wafers, muaj qhov tsis xws luag dawb nto sib npaug rau kev ua haujlwm corrosion.
Yog tias lub tshuab CNC siv rau cov khoom siv polyurethane thiab cov khoom ua haujlwm, nws tuaj yeem ua qhov chaw ua haujlwm ntawm qhov chaw ua haujlwm. Nws tuaj yeem ua tiav ob theem atomic elastic tshem tawm thiab pom cov duab geometric zoo. Daim duab 2 qhia txog CNC elastic launch machining ntaus ntawv. Tag nrho cov cuab yeej yog peb axis CNC system, nrog cov pob polyurethane ntsia ntawm CNC spindle thiab tig los ntawm lub cev muaj zog sib txawv, nrog rau kev thauj khoom ntawm 2N. Thaum ua cov txheej txheem ntawm silicon wafers, siv ib txoj kab uas hla ntawm 0.1 μ M zirconia hmoov yog tawm mus rau saum npoo ntawm lub workpiece ntawm ib tug ceev ntawm 100m / s thiab Lub kaum sab xis ntawm 20 degree mus rau kab rov tav dav hlau, nrog rau machining raug ntawm ± 0.1 μ m. Nto roughness Ra0.0005 μ Hauv qab m.
2.1.2 Floating Sib Tsoo thiab Polishing
Lub hauv paus ntsiab lus machining daim duab ntawm floating sib tsoo polishing yog pom nyob rau hauv daim duab 3 (Daim duab 3 yog rho tawm). Nws siv lub hauv paus ntsiab lus ntawm Fluid mechanics kom cov polisher ntab deb ntawm lub workpiece, thiab ua rau ib tug xov tooj ntawm wedge grooves ntawm lub workpiece nto ntawm polisher. Thaum lub polisher tig ntawm kev kub ceev, lub workpiece los yog polisher ntab vim lub zog siab ntawm cov roj wedge, thiab cov khoom abrasive nyob nruab nrab ntawm polish lub workpiece nto. Floating polishing tuaj yeem ua cov txheej txheem ua haujlwm nrog cov flatness siab, tsis muaj lub ntsej muag kawg lossis deformation tsis xws luag. Floating polishing tuaj yeem siv rau qhov sib nqus qhov sib nqus ntawm lub computer hau. Ultra precision machining ntawm cov khoom siv kho qhov muag thiab cov khoom siv ua haujlwm ceramic substrates tuaj yeem tiv thaiv qhov sib txawv ntawm cov ciam teb los ntawm kev xaiv cov kua polishing tsim nyog thiab tshuaj ntxiv. Txawm tias cov ntaub ntawv polycrystalline tuaj yeem ua tiav qhov roughness ntawm Ra0.002 μ Qhov saum npoo ntawm m. Siv cov graphite mos heev thiab dej soluble LiF los txhuam cov sapphire nyuaj heev {0001}. Nws qhov roughness ntawm qhov chaw tuaj yeem ncav cuag Ra0.00008 μ M. Txais kev sib tsoo thiab polishing, tsis tas siv cov khoom siv, qhov kawg lub ntsej muag lub vojvoog tuaj yeem ua me me li 0.01 μ M. Qhov saum npoo tom qab ntab sib tsoo thiab polishing muaj cov yam ntxwv zoo crystallization, thiab tsis muaj residual siab ntawm cov txheej txheem nto.
2.1.3 Sib nqus sib tsoo
Sib nqus sib tsoo yog ib txoj hauv kev tshiab ntawm kev sib tsoo uas siv qhov kev txiav txim ntawm cov hlau nplaum. Nws muaj peev xwm ua tau zoo thiab sai ua ultra precision machining ntawm ntau yam ntaub ntawv, qhov ntau thiab tsawg, thiab cov khoom siv. Nws yog kev nqis peev tsawg, kev ua haujlwm siab, ntau yam, thiab kev sib tsoo ua haujlwm zoo.
Sib nqus floating sib tsoo. Nws yog tsim los ntawm cov kua nplaum sib nqus nyob rau hauv qhov kev txiav txim ntawm ib qho chaw sib nqus (sib nqus sib nqus, surfactants, thiab cov khoom siv ua kua xws li dej thiab roj), uas ua rau cov hlau nplaum tsis sib nqus ua kom sib tsoo thiab txhuam cov rotating workpiece hauv qab ntws. thiab ntab ua haujlwm ntawm cov dej sib nqus, yog li txhim kho qhov zoo thiab kev ua haujlwm ntawm kev ua tiav. Nws tuaj yeem tau txais Ra Less dua lossis sib npaug rau 0.01 μ M muaj cov txheej txheem tsis zoo rau kev ua haujlwm saum npoo thiab tuaj yeem sib tsoo thiab polish workpieces nrog cov duab sib txawv.
Cov txheej txheem machining no tau pib thaum xyoo 1940 hauv Tebchaws Meskas. Los ntawm kev nthuav dav ntxiv thiab txhim kho nws cov cuab yeej siv thiab cov cuab yeej siv, thiab kev siv cov txheej txheem finite keeb los simulate cov txheej txheem sib nqus polishing, cov yam ntxwv ntawm cov dej sib nqus thiab cov khoom abrasive nyob rau hauv cov hlau nplaum induction tau txheeb xyuas, txhawb kev txhim kho thiab siv cov txheej txheem no.
Sib nqus sib nqus ntawm magnetic abrasives. Daim duab schematic tau qhia hauv daim duab 4 (Daim duab 4 yog luv luv). Thaum lub sij hawm sib nqus sib nqus, lub workpiece yog muab tso rau hauv ib qho chaw sib nqus tsim los ntawm ob tug sib nqus ncej, thiab sib nqus abrasive yog muab tso rau hauv qhov sib txawv ntawm lub workpiece thiab cov hlau nplaum. Nyob rau hauv qhov kev txiav txim ntawm magnetic teb quab yuam, abrasives yog teem kom zoo raws li cov kev taw qhia ntawm magnetic force kab, tsim ib tug mos thiab nruj "magnetic sib tsoo txhuam". Thaum lub workpiece tig nyob rau hauv ib tug sib nqus teb thiab undergoes axial vibration, txheeb ze zog tshwm sim ntawm lub workpiece thiab abrasive, thiab "abrasive txhuam" grinds nto ntawm lub workpiece.
Sib nqus sib tsoo muaj cov yam ntxwv hauv qab no:
Los ntawm kev hloov lub zog ntawm qhov sib nqus, qhov sib tsoo siab tuaj yeem tswj tau yooj yim;
Vim qhov sib txawv ntawm machining (1-4mm) nruab nrab ntawm tus ncej hlau nplaum thiab qhov chaw ntawm qhov chaw ua haujlwm, kev sib tsoo yooj yim siv " txhuam txhuam" tuaj yeem siv tsis tau tsuas yog rau cylindrical thiab planar sib tsoo, tab sis kuj rau kev sib tsoo qhov chaw thiab dawb nto;
Nyob rau hauv cov xwm txheej uas tus qauv sib nqus ncej yog tsau, lub zog sib tsoo tuaj yeem hloov kho los ntawm Magnetic flux ceev, thiab cov txheej txheem machining tuaj yeem ua tau yooj yim;
Lub abrasive tsis tu ncua yob thiab hloov txoj hauj lwm raws li qhov chaw ua haujlwm, ua rau nws muaj kev ua haujlwm zoo ntawm tus kheej;
Cov khoom siv hlau nplaum raug txwv ntawm cov ncej hlau nplaum thiab tsis txhob ua paug rau qhov chaw ua haujlwm;
Kev ua haujlwm siab;
Nws tuaj yeem zom ob qho tib si ferromagnetic thiab cov khoom tsis yog ferromagnetic.
Sib nqus sib tsoo yog tsim rau kev sib tsoo, polishing, thiab deburring ntawm precision qhov chaw, xws li sab hauv thiab sab nrauv raceways ntawm bearings, swb li qub, iav twj tso kua mis, luam Circuit Court boards, pwm, saib rooj plaub, hniav, thiab lwm yam. Nws tuaj yeem siv tsis tau. tsuas yog rau cov khoom siv hlau nplaum xws li hlau, carbon steel, thiab hlau alloy, tab sis kuj rau cov khoom siv hlau tsis sib nqus xws li tooj dag, stainless hlau, thiab titanium alloys, nrog rau cov khoom tsis yog xim hlau xws li ceramics thiab silicon wafers.
Vim nws muaj zog adaptability thiab dav daim ntawv thov ntau yam, sib nqus sib nqus yog ib qho kev cog lus heev ultra precision machining txoj kev. Nyob rau hauv lub neej yav tom ntej, sib nqus sib nqus yuav tsim nyob rau hauv ob qho kev qhia hauv qab no:
Tsim tshiab magnetic abrasives nrog zoo magnetic conductivity thiab siab zog thiab hardness;
Grind complex zoo li qhov chaw uas siv ib tug rotating magnetic teb.
2.1.4 Electrolytic sib nqus abrasive polishing
Electrolytic magnetic abrasive polishing yog kev sib xyaw ntawm electrochemical machining thiab sib nqus abrasive polishing. Lub hauv paus ntsiab lus ntawm daim duab qhia tau pom nyob rau hauv daim duab 5. Anode kev twb kev txuas ntawm tam sim no thiab voltage rau lub workpiece, cathode kev twb kev txuas rau lub cuab tam, thiab cathode kev twb kev txuas mus rau ib feem ntawm lub workpiece qhov twg burrs yuav tsum tau muab tshem tawm. Cov electrolyte yog tsav los ntawm lub twj tso kua mis thiab ntws los ntawm lub cathode los ntawm lub burr cheeb tsam ntawm lub anode workpiece mus txog rau lub reflux tank. Lub workpiece rotates ntawm ib tug tej yam ceev thaum nyob rau hauv axial vibration. Siv lub zog DC magnetic teb nyob rau hauv lub dav hlau kev taw qhia perpendicular mus rau lub workpiece axis thiab lub hwj chim kab, sau lub magnetic teb nrog dawb magnetic abrasive, thiab "abrasive txhuam" muaj li ntawm sib nqus abrasive sai sai cuam tshuam lub nto ntawm lub workpiece kom tshem tawm protruding burrs thiab ua kom du machining.
Txoj kev sib tsoo sib xyaw no yog tsim rau precision deburring thiab ua tiav ntawm high-strength, siab hardness, thiab siab toughness cov ntaub ntawv. Nws qhov kev ua tau zoo yog ob zaug ntawm cov hlau nplaum sib tsoo txoj kev sib tsoo, thiab nws tuaj yeem txhim kho qhov roughness ntawm lub workpiece los ntawm ob theem, yam tsis muaj kev tsim cov burrs tom qab ua tiav.
2.2 Ultra precision sib tsoo txoj kev raws li kev sib cuam tshuam mechanochemical
Mechanochemical sib tsoo yog txheej txheem sib tsoo uas tshwm sim nyob rau hauv kev cuam tshuam ntawm micro hmoov hais thiab cov tshuaj ua haujlwm ntawm cov kua dej sib tsoo, tshem tawm cov kab ntau ntawm cov khoom los ntawm qhov chaw ntawm lub workpiece. Txoj kev no muaj kev lag luam zoo thiab muaj txiaj ntsig zoo. Tsis tsuas yog nws tuaj yeem ua tiav qib siab ntawm qhov roughness, tab sis qhov tseeb geometric ntawm lub tshuab ua haujlwm kuj yog siab heev, thiab yuav luag tsis muaj txheej txheej deterioration ntawm cov txheej txheem txheej txheem, uas muaj cov txiaj ntsig tseem ceeb rau kev ua cov khoom siv microelectronic.
Kev sib tsoo disc yog cam khwb cia nrog ib txheej tin, thiab grooves yog txiav nyob rau hauv lub circumferential kev taw qhia. Pob zeb diamond cutters yog siv los txiav lub ntsej muag kawg ntawm kev sib tsoo disc, ua rau nws muaj lub dav hlau siab thiab daim iav zoo li nto. Kev sib tsoo disc thiab workpiece ncej tig nrog siab precision ntawm ib tug ceev ntawm {{0}}r / min, thiab lub workpiece yog tsau ntawm lub workpiece ncej. Kev sib hloov kev taw qhia ntawm lub workpiece ncej thiab sib tsoo disc spindle yog tib yam. Nyob rau hauv qhov kev txiav txim ntawm cov kua dynamic siab nyhuv, lub workpiece raug tshem tawm ntawm kev sib tsoo disc nrog ib tug ntab qhov sib txawv ntawm ob peb micrometers, thiab lub workpiece undergoes sib tsoo txiav txim nyob rau hauv cov tshuaj ua hauj lwm ntawm cov kua sib tsoo thiab cov cuam tshuam ntawm micro hmoov hais. SP46 ultra precision grinder tsim los ntawm Nagoya Institute of Industrial Technology hauv Nyij Pooj yog ib qho kev sib tsoo ultra precision raws li kev sib cuam tshuam ntawm kev siv tshuab. Lub tshuab no siv 0.02 μ Qhov saum npoo roughness ntawm silicon wafers ua tiav nrog m SiO2 micropowder hais tuaj yeem ncav cuag 2nm, thiab cov kev ntxhov siab seem yuav luag xoom. Sib tsoo BK7 optical iav nrog ib txoj kab uas hla ntawm 100 hli thiab tuab ntawm 30 hli ntawm lub tshuab no, nrog lub tiaj tiaj ntawm 0.031 μ m. Qhov saum npoo roughness RMS (hauv paus txhais tau tias square deviation) tuaj yeem ncav cuag 3.8nm.
Vim tias cov khoom siv tsawg tsawg ntawm txoj kev sib tsoo no, nws yuav tsum tau ua kom lub workpiece nws tus kheej muaj qee qhov tseeb thiab qhov zoo ntawm qhov chaw. Ua ntej sib tsoo, qhov tseeb ntawm cov khoom ua haujlwm yuav tsum tau tswj nyob rau hauv: flatness ({{0}}) μ m. Nto roughness RMS (0.1-0.2) μ Hauv qhov ntau ntawm m. Txwv tsis pub, nws yuav ua rau tsis muaj peev xwm ua tiav kev sib tsoo, ua rau kev puas tsuaj rau lub workpiece.
2.3 Liquid nto sib tsoo thiab polishing
Liquid nto sib tsoo polishing, tseem hu ua hydroplane polishing. Qhov tseem ceeb ntawm txoj kev sib tsoo no yog tias nws tsis siv cov abrasives. Thaum lub sij hawm polishing, qhov sib txawv yog tsim ntawm lub workpiece thiab polishing disc (crystal tiaj tiaj phaj) los ntawm cov kua siab, thiab lub zog ntawm corrosive kua yog siv rau polishing. Yog li ntawd, nws yog ib txoj kev ua tshuaj corrosion. Cov tshuaj corrosive siv hauv kev ua yog sib xyaw ntawm methanol, ethylene glycol, thiab bromine. Feem ntau yog siv rau kev ua cov nto ntawm CaAs thiab InP substrates.
2.4 Hydration sib tsoo thiab polishing
Hydration sib tsoo polishing yog ib txoj kev sib tsoo polishing uas nquag siv lub cim ntawm cov dej tshuaj tiv thaiv ntawm qhov cuam tshuam tseem ceeb ntawm lub workpiece. Nws lub ntsiab feature yog tias nws tsis siv cov khoom abrasive los yog ua kua, thiab cov cuab yeej ua haujlwm zoo ib yam li lub tshuab polishing tam sim no, tsuas yog ua hauv ib puag ncig dej vapor. Vim li no, sim kom tsis txhob siv cov khoom siv polishing disc uas tuaj yeem ua rau qhuav tawm cov tshuaj tiv thaiv nrog lub workpiece. Raws li cov polishing disc tig, lub workpiece tuav txav rov qab mus rau saum nws. Thaum lub sij hawm hydration polishing txheej txheem, ob yam khoom tsim kom muaj kev sib txhuam thiab ua kom kub thiab siab nyob rau hauv qhov chaw sib cuag, uas ua rau kom cov atoms los yog molecules nyob rau saum npoo ntawm lub workpiece. Lub hydration txheej yog tsim rau ntawm lub hauv paus nto los ntawm kev sib cuam tshuam ntawm Superheated dej vapor molecules thiab dej. Nrog kev pab los ntawm Superheated dej chav (tsis pub dawb abrasive hais), cov hydration txheej yog sib cais thiab tshem tawm ntawm qhov chaw ntawm lub workpiece. Qhov kev tshem tawm thickness yog ob peb feem kaum ntawm ib nanometer, yog li qhov chaw huv si tsis muaj khawb, du gloss thiab distortion tuaj yeem tau.
Kev sib tsoo polishing yog tsim nyog rau ultra precision machining ntawm sapphire thiab Zinc selenide crystals (optical ntsiab rau CO2 lasers) yuav tsum tau zoo nto smoothness, siab flatness, siv lead ua distortion dawb thiab siab huv. Tsis tas li ntawd, raws li cov ntaub ntawv hydrophilic, iav, siv lead ua, MgO, Y2O3, MgAl2O4, thiab lwm yam yuav tsum tau polished nrog hydration.
2.5 Ultrasonic sib tsoo thiab polishing
Ultrasonic sib tsoo thiab polishing yog ib qho tsis sib cuag ultra precision sib tsoo txoj kev. Khaws qhov sib txawv nruab nrab ntawm lub ntsej muag kawg ntawm lub taub hau ultrasonic vibration lub taub hau thiab qhov chaw ntawm lub workpiece δ, Thiab sau nws nrog micro abrasive ua hauj lwm kua. Thaum lub cuab yeej ultrasonic vibration vibrates ntawm qee zaus, nws tsav cov micro abrasive hais los cuam tshuam rau saum npoo ntawm workpiece, yog li sib tsoo ntawm qhov chaw ua haujlwm.
Thaum lub sij hawm sib tsoo ultrasonic, ntau cov khoom abrasive cuam tshuam rau ntawm qhov chaw ua haujlwm hauv lub plawv zoo li lub sijhawm ntawm tib zaus li ultrasonic kev co, tshem tawm lossis hloov kho cov txheej txheem metamorphic ntawm qhov chaw ua haujlwm, thiab tsim cov txheej txheem metamorphic tshiab ( ie deg txheej txheej) hauv qab nws. Yog tias qhov kev xaiv ntawm cov txheej txheem tsis xws li amplitude tus nqi, kev sib tsoo siab, thiab cov cuab yeej ceev yog qhov tsim nyog, cov txheej txheem metamorphic tshiab tuaj yeem ua thinner thiab ntau dua, uas ua rau qhov chaw uas yuav luag tsis muaj kev puas tsuaj. Ultrasonic sib tsoo muaj ntau yam kev siv thiab tuaj yeem ua cov ntaub ntawv nyuaj thiab nkig, nrog rau cov chaw tiaj tus thiab cov npoo nkhaus. Tam sim no, kev sib tsoo ultrasonic tuaj yeem laum qhov me me nrog txoj kab uas hla ntawm {{0}}.1-1.0mm ntawm 3mm tuab iav. Nyob rau tib lub sijhawm, nws tus nqi resection ntawm ib chav tsev lub sij hawm kuj yog siab heev, yuav tsum tau complex cov tswv yim thiab kuj yooj yim cov cuab yeej, yog li ua tau zoo siab technical thiab economic kev pab cuam. Hauv ntau qhov xwm txheej, xws li drilling qhov me me hauv iav los yog ua cov khoom ua haujlwm ultra-thin, kev sib tsoo ultrasonic yog cov txheej txheem tsim nyog xaiv lossis tsuas yog cov txheej txheem uas tuaj yeem xaiv.
2.6 Ion beam polishing
Sib txawv los ntawm cov txheej txheem kev siv tshuab polishing, ion beam polishing siv cov khoom siv hluav taws xob siab lossis ions (ions muaj qhov hnyav dua li cov atoms, yog li muaj zog kinetic ntau dua tuaj yeem tau txais), uas raug tua ntawm lub workpiece los ntawm ion phom hauv lub tshuab nqus tsev. . Thaum cov ions nrog lub zog siab ntaus lub workpiece nto, cov khoom ntawm qhov cuam tshuam tau raug tshem tawm ntawm qib atomic. Tus nqi ntawm cov khoom tshem tawm yog nyob ntawm lub sij hawm sputtering ntawm lub ion beam ntawm qhov taw tes. Vim tias cov ion beam polishing yog tshem tawm cov khoom ntawm qib atomic, cov khoom tshem tawm tus nqi qis. Yog li ntawd, ua ntej siv txoj kev no, lub workpiece yuav tsum tau pre polished los ntawm ib txwm txoj kev. Tom qab ua tau raws li qhov yuav tsum tau ua, qhov saum npoo ntawm lub workpiece (xws li spherical nto, aspherical nto, asymmetric dawb nto, thiab lwm yam) tuaj yeem kho nrog kev ua haujlwm siab los ntawm kev siv ion beam polishing. Txawm hais tias ion beam polishing manufacturing xav tau cov cuab yeej siv tseem ceeb thiab cov nqi khiav lag luam siab, nws tseem yuav tsum tau siv ion beam polishing txoj hauv kev rau qee qhov loj kho qhov muag iav nrog tshwj xeeb high-precision.
Piv nrog rau cov txheej txheem kho qhov muag, ion beam polishing txoj kev muaj cov hauv qab no zoo:
(1) Nws tuaj yeem paub cov khoom txiav txim siab ultra precision machining ntawm qib atomic;
(2) Kev kho kom tiav ntawm qhov tsis zoo ntawm qhov chaw tuaj yeem ua tiav los ntawm kev ua haujlwm ib zaug;
(3) Tsis rhiab rau sab nraud ib puag ncig kev co, kub hloov pauv, thiab kev ruaj ntseg thauj khoom;
(4) Vim qhov tseeb tias ion beam polishing yuav tsum tau nqa tawm hauv lub tshuab nqus tsev, cov txheej txheem polishing thiab txheej txheej tuaj yeem nqa tawm hauv tib lub tshuab nqus tsev;
(5) Lub workpiece yuav tsis muaj Edge cuam tshuam ntawm lub cev qhuav dej thiab warping.
3 Kev xaus
Cov saum toj no ultra precision sib tsoo thiab polishing txoj kev yog fundamentally txawv los ntawm tsoos sib tsoo txoj kev
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